Electrostatically actuated encased cantilevers
نویسندگان
چکیده
منابع مشابه
Topology optimization of electrostatically actuated microsystems
This study addresses the design of electrostatically actuated microelectromechanical systems by topology optimization. The layout of the structure and the electrode are simultaneously optimized. A novel, continuous, material-based description of the interface between the structural and electrostatic domains is presented that allows the optimization of the interface topology. The resulting topol...
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ژورنال
عنوان ژورنال: Beilstein Journal of Nanotechnology
سال: 2018
ISSN: 2190-4286
DOI: 10.3762/bjnano.9.130